iSurfa-310 Roughness Waviness Tester
Product Features & Applications
Product Features:
- High-precision large-stroke guide rail with a length of up to 50mm.
- Sensor measurement range: ±100μm.
- Pad serves as the operating device, portable and ergonomic for operation.
- Wireless WiFi communication enables remote operation and convenient usage.
- Ethernet cable connection for communication, with automatic switching capability with WiFi, facilitating faster data transmission in workshops where wireless devices are inconvenient to use.
- Comprehensive parameters, including 5 measurement types and multiple national standards.
- Stylus can be directly replaced, with convenient replacement operation, enabling measurements in different scenarios.
- Sensor can be freely switched between vertical and coaxial positions relative to the guide rail, allowing depth groove measurement from the side without being restricted by the depth of the stylus and groove.
- Supports switching between metric and imperial units on the operating interface and result parameters.
- Supports switching between Chinese and English interfaces.
- Convenient data storage, allowing direct change of storage path to a USB flash drive or SD card inserted into the Pad. CSV data format facilitates easier data use with no upper limit on data storage.
- Includes multiple filtering methods and analysis algorithms that can be freely combined to meet requirements.
- Supports automatic multiple calibrations of standard blocks, significantly reducing calibration errors.
Product Applications:
- Precision Machining: Used to detect the surface roughness and waviness of machined parts, ensuring product quality meets high-precision requirements.
- Wafer Surface Inspection: In the semiconductor manufacturing process, measures the roughness and waviness of wafer surfaces to ensure chip quality and production efficiency.
Technical Specifications
| Model | iSurfa-310 | |||
| Range | X direction | 50mm | ||
| Z direction | ±1000μm | |||
| Sensor resolution | X direction | 0.0016μm/±50μm ~ 0.016μm/±500μm | ||
| Driver | Straightness | 1μm/50mm | ||
| Analysis
algorithm |
Corresponding Standard | JIS-82, JIS-87, JIS-94, JIS-01, JIS- 13, ISO-84, ISO-97, DIN-90 , ASME-95 , GB-14 | ||
| Parameters | Roughness profile | Ra75, Rq , Rp, Rv, Rc , Rt , S, R3z , PPI , Ra , Rsk , Rku, Ry, Sm , RΔa , RΔq , Rz , Pc , Rλa , Rλq , lr , RSm, Rz94, RPc , RS , Rz.I , Rpm , HSC | ||
| Waviness profile | WCA, WCC-q , WCC-p , WCC-v , WCC-m , WCC-Sm, WCA , WC-q , WC-p , WC-v , WCM , WC-Sm, WC-t, Wa , Wq, Wsk , Wku , Wp , Wv , Wz , Wc , Wt, WSm, WΔq , WPc | |||
| Primary profile | Rsk, Rku , Rmax , Sm , Δa , Δq , Rz , λa , λq , lr , TILT A, AVH , Hmax , Hmin , AREA , Rz.J , Pa , Pq, Psk, Pku, Pp , Pv , Pc.I , Pt , PSm , PΔq , PPc, Pc | |||
| Abbott curve | Rk, Rpk, Rvk, Mr1, Mr2, V0, K, A1, A2 | |||
| Motif | NCRX , AR, R, Rx , NR, CPM , SR, SAR, AW , W, Wx, Wte , NW , SW , SAW, Rke , Rpke , Rvke , Mr1, Mr2, V0, K | |||
| Evaluation curve | Roughness profile, Waviness profile, Primary profile, Abbott curve, Motif | |||
| Characteristic curve | Abbott curve(Rmr(c) , Rmr2(c) , Rδc(c) , tp(c), tp2(c), Htp(c)) , Amplitude frequency analysis curve, amplitude distribution curve | |||
| Form remove | global, first half, second half, center, 2 points, curve | |||
| Filter type | Gaussian, FFT , PC , DP, 2RC | |||
| Filter
wave length |
λs | 0 , 2.5 , 8 , 25μm | ||
| λc | 0.08 , 0.25 , 0.8 , 2.5 , 8mm | |||
| λf | 0.8 , 2.5 , 8 , 25m | |||
| Evaluation length | Sampling length × number of samples
(sampling length has standard mode and custom mode) |
|||
| Measurement speed | 0.05mm/s , 0. 10mm/s , 0.50mm/s , 1.00mm/s , 2.00mm/ | |||
| Return speed | 0.05mm/s , 0. 10mm/s , 0.50mm/s , 1.00mm/s , 2.00mm/ | |||
| Sensor | Mode | Standard universal type | ||
| Sensor mode | Differential inductance | |||
| Range | ±1000μm | |||
| Stylus | 5μmR diamond 90° | |||
| Contact Force of the Stylus | Adjustable from 0.4 to 0.75mN | |||
| Operator | Display part | 10-inch color IPS touch screen | ||
| Data output | TF card/U disk/WIFI printing | |||
| Corresponding language | Chinese/English | |||
| Dimensions and Weight | Power supply | AC220V±10%
Built-in Rechargeable Battery (Charged via AC Transformer) Charging Time: 8 Hours |
||
| Power consumption | About 30VA (Capable of 800 measurements after being fully charged) | |||
| Quality | N.W 4Kg
G.W 8Kg |
|||
| Dimensions | Actuator 80 (W) ×392 (L) × 180 (H)
Operator 245 (W) × 162 (D) ×68 (H) |
|||
Standard Configuration
| Name | Qty | Photo |
| Host Actuator | 1 Unit | ![]() |
| Sensor | 1 PC | ![]() |
| 10-inch Pad Operator | 1 Unit | ![]() |
| Host charger | 1 PC | / |
| Pad charger | 1 PC | / |
| Standard stylus | 1 PC | ![]() |
| Roughness standard test block | 1 PC | ![]() |
| Data communication line | 1 PC | / |
| Host waterproof case | 1 PC | / |
| Random tools | Allen wrench (1.5mm and 2.5mm) | / |
| Product certificate | 1 Copy | ![]() |
| Product manual | 1 Copy | ![]() |
| Warranty card | 1 Copy | ![]() |
Optional Configuration
| Name | Photo |
| X-Y Axis Test Table | ![]() |
| Fixture | |
| V-shaped Test Table | ![]() |
| Stylus | ![]() |
| Measurement Platform | ![]() |
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Last updated: 2026-04-02
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