iSurfa-310 Roughness Waviness Tester

ISurfa 310图(1)
ISurfa 310图(2)
ISurfa 310图(3)
ISurfa 310图(4)
ISurfa 310图(5)
ISurfa 310图(6) scaled
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Product Features & Applications

Product Features:

  • High-precision large-stroke guide rail with a length of up to 50mm.
  • Sensor measurement range: ±100μm.
  • Pad serves as the operating device, portable and ergonomic for operation.
  • Wireless WiFi communication enables remote operation and convenient usage.
  • Ethernet cable connection for communication, with automatic switching capability with WiFi, facilitating faster data transmission in workshops where wireless devices are inconvenient to use.
  • Comprehensive parameters, including 5 measurement types and multiple national standards.
  • Stylus can be directly replaced, with convenient replacement operation, enabling measurements in different scenarios.
  • Sensor can be freely switched between vertical and coaxial positions relative to the guide rail, allowing depth groove measurement from the side without being restricted by the depth of the stylus and groove.
  • Supports switching between metric and imperial units on the operating interface and result parameters.
  • Supports switching between Chinese and English interfaces.
  • Convenient data storage, allowing direct change of storage path to a USB flash drive or SD card inserted into the Pad. CSV data format facilitates easier data use with no upper limit on data storage.
  • Includes multiple filtering methods and analysis algorithms that can be freely combined to meet requirements.
  • Supports automatic multiple calibrations of standard blocks, significantly reducing calibration errors.

Product Applications:

  • Precision Machining: Used to detect the surface roughness and waviness of machined parts, ensuring product quality meets high-precision requirements.
  • Wafer Surface Inspection: In the semiconductor manufacturing process, measures the roughness and waviness of wafer surfaces to ensure chip quality and production efficiency.

Technical Specifications

Model iSurfa-310
Range X direction 50mm
Z direction ±1000μm
Sensor resolution X direction 0.0016μm/±50μm ~ 0.016μm/±500μm
Driver Straightness 1μm/50mm
Analysis

algorithm

Corresponding Standard JIS-82, JIS-87, JIS-94, JIS-01, JIS- 13, ISO-84, ISO-97, DIN-90 , ASME-95 , GB-14
Parameters Roughness profile Ra75, Rq , Rp, Rv, Rc , Rt , S, R3z , PPI , Ra , Rsk , Rku, Ry, Sm , RΔa , RΔq , Rz , Pc , Rλa , Rλq , lr , RSm, Rz94, RPc , RS , Rz.I , Rpm , HSC
Waviness profile WCA, WCC-q , WCC-p , WCC-v , WCC-m , WCC-Sm, WCA , WC-q , WC-p , WC-v , WCM , WC-Sm, WC-t, Wa , Wq, Wsk , Wku , Wp , Wv , Wz , Wc , Wt, WSm, WΔq , WPc
Primary profile Rsk, Rku , Rmax , Sm , Δa , Δq , Rz , λa , λq , lr , TILT A, AVH , Hmax , Hmin , AREA , Rz.J , Pa , Pq, Psk, Pku, Pp , Pv , Pc.I , Pt , PSm , PΔq , PPc, Pc
Abbott curve Rk, Rpk, Rvk, Mr1, Mr2, V0, K, A1, A2
Motif NCRX , AR, R, Rx , NR, CPM , SR, SAR, AW , W, Wx, Wte , NW , SW , SAW, Rke , Rpke , Rvke , Mr1, Mr2, V0, K
Evaluation curve Roughness profile, Waviness profile, Primary profile, Abbott curve, Motif
Characteristic curve Abbott curve(Rmr(c) , Rmr2(c) , Rδc(c) , tp(c), tp2(c), Htp(c)) , Amplitude frequency analysis curve, amplitude distribution curve
Form remove global, first half, second half, center, 2 points, curve
Filter type Gaussian, FFT , PC , DP, 2RC
Filter

wave

length

λs 0 , 2.5 , 8 , 25μm
λc 0.08 , 0.25 , 0.8 , 2.5 , 8mm
λf 0.8 , 2.5 , 8 , 25m
Evaluation length Sampling length × number of samples

(sampling length has standard mode and custom mode)

Measurement speed 0.05mm/s , 0. 10mm/s , 0.50mm/s , 1.00mm/s , 2.00mm/
Return speed 0.05mm/s , 0. 10mm/s , 0.50mm/s , 1.00mm/s , 2.00mm/
Sensor Mode Standard universal type
Sensor mode Differential inductance
Range ±1000μm
Stylus 5μmR diamond 90°
Contact Force of the Stylus Adjustable from 0.4 to 0.75mN
Operator Display part 10-inch color IPS touch screen
Data output TF card/U disk/WIFI printing
Corresponding language Chinese/English
Dimensions and Weight Power supply AC220V±10%

Built-in Rechargeable Battery (Charged via AC Transformer)

Charging Time: 8 Hours

Power consumption About 30VA (Capable of 800 measurements after being fully charged)
Quality N.W 4Kg

G.W 8Kg

Dimensions Actuator 80 (W) ×392 (L) × 180 (H)

Operator 245 (W) × 162 (D) ×68 (H)

Standard Configuration

Name Qty Photo
Host Actuator 1 Unit
Sensor 1 PC
10-inch Pad Operator 1 Unit
Host charger 1 PC /
Pad charger 1 PC /
Standard stylus 1 PC
Roughness standard test block 1 PC
Data communication line 1 PC /
Host waterproof case 1 PC /
Random tools Allen wrench (1.5mm and 2.5mm) /
Product certificate 1 Copy
Product manual 1 Copy
Warranty card 1 Copy

Optional Configuration

Name Photo
X-Y Axis Test Table
Fixture
V-shaped Test Table
Stylus
Measurement Platform